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시설
HY-ISS LAB
한양 스마트반도체 나노팹 (클린룸)
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| No. | 공정 | 장비ㆍ모델명 | 구입년도 |
|---|---|---|---|
| 1 | Thin film deposition | Molecular Layer Deposition | 2015 |
| 2 | Thin film deposition (Photo) | Magnetron Sputtering (NNS) | 2015 |
| 3 | Thin film deposition | Glove Box | 2015 |
| 4 | Thin film deposition | Thermal Evaporator (대기하이텍) | 2018 |
| 5 | Thin film deposition | Co-Sputtering system (대기하이텍) | 2015 |
| 6 | Thin film deposition | Thermal ALD (Channel) | 2019 |
| 7 | Thin film deposition | Plasma Enhanced ALD (Insulator) | 2011 |
| 8 | Thin film deposition | Metal ALD (set up 중) | 2023 |
| 9 | Thin film deposition | Thermal ALD (Insulator) | 2019 |
| 10 | Thin film deposition | Magnetron Sputter Deposition Systems (Phoenix-01) | 2005 |
| 11 | Thin film deposition | Thermal ALD (PLUS 200) | 2002 |
| 12 | Thin film deposition | Rotation ALD (Atomic-Shell) | 2013 |
| 13 | Thin film deposition | Thermal evaporator system | 2007 |
| 14 | Annealing | Tube furnace | 2012 |
| 15 | Etch | RIE systerm 1 (SBE-4T-250R) | 2002 |
| 16 | Etch | RIE systerm 2 (AFS-R4T) | 2022 |
| 17 | Etch | Michelan c3 (Etcher) | 2018 |
| 18 | Etch | ALE (대기하이텍) | 2023 |
| 19 | Oxidation&Annealing | Dry oven (C-DOA) | 2012 |
| 20 | Photo | Aligner(MDA-400M) | 2018 |
| 21 | Photo | Karl Suss (MJB3 350W Mask Aligner) | 2004 |
| 22 | Exhaust | Fumehood (J-FH180-P.P) | 2023 |
| 23 | PR coating | Spin Coater (ACE-200) | 2022 |
| 24 | PR coating | Spin Coater (Top-8) | 2023 |
| 25 | PR coating | Hot Plate (SP88850105) | 2022 |
| 26 | PR coating | Hot Plate (SP88857105) | 2022 |
| 27 | Cleaning | Sonicator (Powersonic605) | 2017 |
| 28 | Patterning | Nano imprint | 2018 |
| 29 | Cleaning | UV Ozone cleaner (UVC-30) | 2012 |
| 30 | Wet & Cleaning | Wet Station (WS-1) | 2023 |
| 31 | Wet & Cleaning | Wet Station (WS-2) | 2023 |
| 32 | Develop & Strip | Wet Station (WS-3) | 2023 |
| 33 | Analysis | UV spectrophotometer (Libra S70) | 2011 |
| 34 | Annealing | Hot Plate (HSD120-03P) | - |
| 35 | Inspection | Optical Microscope (BX53MRF) | 2023 |
| 36 | Inspection | Optical Microscope (MX8R) | 2023 |
